ISO14706:2000

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ISO Standards: ISO14706:2000



Standard Number ISO14706:2000
Standard Title Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray flourescence (TXRF) spectroscopy
Published On 15/05/01
Approx Page Count 32
Standard Description Surface chemistry, Surface properties, Surfaces, Surfactants, Chemical analysis and testing, Contamination, Contaminants, Silicon, Substrates (insulating), X-ray fluorescence spectrometry, X-ray analysis, Fluorimetry, Reflection, Atoms, Density, Epitaxial
Cross Ref ISO5725-2:1994, ISO14644-1
Replaces the Following :
Replacement Note
Replacement
Replacement Note 1
Original Committee CII/60
ISB Number 058037252 9
Other Equivalent ISO14706:2000


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