ISO14237:2000

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ISO Standards: ISO14237:2000



Standard Number ISO14237:2000
Standard Title Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
Published On 15/04/00
Approx Page Count 22
Standard Description Surface chemistry, Chemical analysis and testing, Surface properties, Secondary, Ions, Mass spectrometry, Spectroscopy, Determination of content, Boron, Concentration (chemical), Single, Crystals, Silicon, Homogeneity, Doping agents, Semiconductor technol
Cross Ref ISO5725-2:1994
Replaces the Following :
Replacement Note
Replacement
Replacement Note 1
Original Committee CII/60
ISB Number 058034674 9
Other Equivalent ISO14237:2000


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